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> Novellus Concept 2 8" CVD-W Vacuum System

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Novellus Concept 2 8" CVD-W Vacuum System

Brand Name :
Novellus
Model Number :
Concept 2 8" CVD-W

Related Keywords : vacuum system

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Contact Information

Persemenpora Indoequipt: Membership Type : Free member; Registration Date : 2011-11-17; Country/Region : Indonesia; city : Kepulauan Riau; Contact : Girik Nitoh (Mr.)

Product Details

Company Profile

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Brand Name : Novellus
Model Number : Concept 2 8" CVD-W

Description

Specifications:
- Digital Dynamics IOC EPROM ver. 4.1
- QNX version 3.20 system controller
- DEC Klockner-Moeller power rack
- Ergonomic cassette loader for DLCM-S
- Brooks MTR-5 robot type 2 (DLCM-S) w/ animatics controller
- 200mm wafer indexer with right and left indexer drives
- Right and left loadlock chamber assemblies
- 2 Novellus Concept 2/Dual Altus CVD-W deposition chambers
- Optical endpoint detection
- Gas box
- Brooks 5964 mass flow controllers: Silane 50 SCCM, Tungsten Hexafluoride 750 SCM, C2F6 2 SLM, Hydrogen 20 SLM, Argon 2 SLM, Argon 10 SLM, Argon 20 SLM, Nitrogen 10 SLM, Oxygen 2 SLM
- Eflow gas purge panel
- MKS 100 Torr, non-heated CE mark manometers
- SiH4 exhausted enclosure
- Anafaze temperature controller, EPROM ver. 2.33
- MOER edge exclusion ring compatible
- Sapphire viewport windows
- Trazar AMU2-1 matching network
- ENI OEM 25A-01 and 28B-01 generator kit, CE mark
- AC control rack, module controller P100/16 Meg
- 2 BOC Edwards QDP80-QMB-1200 pumps
- Veriflo valves
- 24 kW watlow exhaust mantle heat system

Price

Price : USD 19800 / Set

Price Condition : FOB Hang Nadim Airport

Packaging

Packing : EMS, FedEx or Customer request.

Others

Delivery Lead Time : 6-9 Business days

Registration Date	2011/11/17 (Year/Month/Date)
Buyer / Seller in EC21	Seller
Business Type	Agent
Year established	2007
Employees total	11 - 50
Annual revenue	Less than USD 100,000

Company	Persemenpora Indoequipt
Address	Baloi Polisi Blok D street 39 Kota Batam Kota Batam Kepulauan Riau 29463 Indonesia
Phone	62 - 899 - 7179681
Homepage
Contact	Girik Nitoh

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Novellus Concept 2 8" CVD-W Vacuum System

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