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Novellus Concept 2 8" CVD-W Vacuum System

  • Company Name:Persemenpora Indoequipt
  • Membership:Free member
  • Registration Date:2011. 11. 17
  • CountryRegion:Indonesia
  • City:Kepulauan Riau
  • Contact:Girik Nitoh (Mr.)
  • Related Keywords:vacuum system
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Quick Information

  • Brand Name :Novellus
  • Model Number :Concept 2 8" CVD-W

Description

Specifications:
- Digital Dynamics IOC EPROM ver. 4.1
- QNX version 3.20 system controller
- DEC Klockner-Moeller power rack
- Ergonomic cassette loader for DLCM-S
- Brooks MTR-5 robot type 2 (DLCM-S) w/ animatics controller
- 200mm wafer indexer with right and left indexer drives
- Right and left loadlock chamber assemblies
- 2 Novellus Concept 2/Dual Altus CVD-W deposition chambers
- Optical endpoint detection
- Gas box
- Brooks 5964 mass flow controllers: Silane 50 SCCM, Tungsten Hexafluoride 750 SCM, C2F6 2 SLM, Hydrogen 20 SLM, Argon 2 SLM, Argon 10 SLM, Argon 20 SLM, Nitrogen 10 SLM, Oxygen 2 SLM
- Eflow gas purge panel
- MKS 100 Torr, non-heated CE mark manometers
- SiH4 exhausted enclosure
- Anafaze temperature controller, EPROM ver. 2.33
- MOER edge exclusion ring compatible
- Sapphire viewport windows
- Trazar AMU2-1 matching network
- ENI OEM 25A-01 and 28B-01 generator kit, CE mark
- AC control rack, module controller P100/16 Meg
- 2 BOC Edwards QDP80-QMB-1200 pumps
- Veriflo valves
- 24 kW watlow exhaust mantle heat system

Price

  • Price Condition : FOB
  • Price : USD 19800 / Set
  • Delivery Port : Hang Nadim Airport

Packaging & Delivery

  • Packing : EMS, FedEx or Customer request.
  • Delivery Lead Time : 6-9 Business days

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  • Novellus Concept 2 8

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Novellus Concept 2 8" CVD-W Vacuum System

Novellus Concept 2 8" CVD-W Vacuum System

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