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Tilter Head and Roplat Overhaul

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  • Model Number :VARIAN E500EHP or VARIAN E220

Description

ROPLAT HEAD ASS�Y: Application: Wafer clamping & Pins Up & Down. Equipment: E220/500EHP. Remark: Drawing & procedure TILTER HEAD ASS�Y: Application: Implant&Tilt(Angle) Action. Equipment: E220/500EHP. Remark: Drawing & procedure

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Tilter Head and Roplat Overhaul

Tilter Head and Roplat Overhaul

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SINO-TECHNO INTERNATIONAL CORP
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