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  • Semiconductor Scrubber

    • Place of origin:  

      Korea

    etch NF3 3.0 slm > 95% at 300slm inlet flow for CVD MTBF / MTTR > 6 months / 1.5hr for full maintenance CDA Adjustable 3~10 SLM PCW Adjustable 10~15 SLM N2 Adjustable 20~100 SLM Intel Numbers NW50- 4 inlets (※ Optional : NW50- 2inlets) ○ DRE for PFC gases CF4 > 90% SF6 > 90% NF3 > 95% All other PFC gases treated with DRE>90% ○ Toxics gas emissions HF, HCl, BCl3, HBr, SiF4 …< TLV and IDLH

    [Related Keywords : semiconductor scrubber]

    • BDC Inc

    • Business Type

      Manufacturer

    • Location

      Daejeon, Korea

    • Employees Total

      11 - 50

    • Annual Revenue

      More than 100,000,000

    Contact Now Start Order
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