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  • Water Process

    heating element, and has a forced-cooling system to increase throughput. As an optional feature, N2 load lock can be utilized to maximize the processing capacity. Features High processing capacity Up to 100 wafers can be continuously processed in 2 batches. Newly developed heating elements The furnace has heaters for low-temperature/low-temperature processes. N2 load lock The capacity of th

    [Related Keywords : Water Process, Vertical Furnaces/LPCVD]

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