<?xml version="1.0" encoding="utf-8" ?>
<rss version="2.0">
<channel>
<title><![CDATA[EC21 Product Catalogs - d hcl]]></title>
<link><![CDATA[https://www.ec21.com/ec-market/d_hcl--2673/1/d hcl.html]]></link><item>
<title><![CDATA[Semiconductor Scrubber]]></title><link><![CDATA[https://bdc77.en.ec21.com/Semiconductor_Scrubber--11837922_11837924.html]]></link><description><![CDATA[D) x 1850(H)
Power Consumption
11 Kw for CF4 DRE 90%
8 Kw for NF3 DRE 95%
Torch lifetime
&gt; 12 Months
Target Gases / DRE
CF4 1.0 slm &gt; 90% at 150slm inlet flow for Dry etch
NF3 3.0 slm &gt; 95% at 300slm]]></description><pubDate><![CDATA[20231231]]></pubDate></item>

</channel>
</rss>