EC21 Product Catalogs - wafer pre aligner

Wafer Pre Aligner

20130319

Wafer Pre Aligner Feature - Wafer Size (2inch ~ 18inch) - Notch, Flat Wafer, Ring Type, Thin Wafer (50um) - Si, Glass, Film, Sapphire - Compact Size - Fast Alignment (< 3.5sec) - High Performance Ac

Vacuum Pre-aligner(Hhvpa)

20240531

VACUUM PRE-ALIGNER(HHVPA)Technical AdvantagesVacuum Wafer Pre-AlignerCompatible with 150v200mm wafers(manual)Little installation space, can be installed in aisle chamberHigh alignment accuracy and sp