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Sell laboratory multi source high vacuum thermal evaporator

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  • Company Name :Zhengzhou CY Scientific Instrument Co.,
  • Membership :Free member
  • Registrarion Date :2020. 07. 13
  • CountryRegion:China
  • Address:No. 820, 8th Floor, 1st Unit, 9th Block, Zhengzhou Henan, China
  • Phone / Fax:86-371-55199322  /  
  • Contact:jibin wang
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Description

multi-source high-vacuum evaporation coating instrument has two sets of evaporation sources. It adopts a tungsten boat evaporation source and water-cooled copper electrodes. It can support a maximum current of 300A and a heating temperature of up to 3000 ° C. It can realize the evaporation of various refractory metals.

Sample stage  Size
Max support φ150mm sample
Height Adjustable up and down 70mm
Evaporation source  Quantity Tungsten Boat x2
Vacuum chamber  
**Chamber size:Dia. 300mm X 400mm
**Observation window:Front φ100mm with shading sheet
**Chamber material:304 stainless steel
**Opening method:Front door open
Film thickness control  Crystal vibrating film thickness measuring instrument, optional multi-channel film thickness controller
Vacuum system  
**Backing pump:Dual stage rotary vane pump
**Pumping port:KF16
**Secondary pump:Turbo molecular pump
**Pumping port:CF160
**Vacuum measurement :Resistance + ionization compound vacuum gauge
**Exhaust rate:Mechanical pump 1.1L / s Molecular pump 600L / s
**Ultimate vacuum:1.0E-5Pa
**Pumping rate:Rotary vane pump: 1.1L / S
Flowmeter  One way mass flowmeter 500sccm Ar gas
Control System:PLC automatic control.Operation interface: touch screen + operation panel
Supply voltage:AC380V,50Hz
Machine size:1000mm x 800mm x 1500mm
Total power:5kW
Machine weight:350kg

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  • Sell laboratory multi source high vacuum thermal evaporator

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