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Supplier Info.

Company Name Koyo Thermo Systems Korea Co., Ltd.
Membership Free member
Registration Date2006.09.17
Country/RegionKorea
CityPyeongtaek-si
Contact Atsushi Arakawa(Mr.)

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Koyo Thermo Systems Korea Co., Ltd.

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Product Attributes

- Model Number VF-5900
- Related Keywords Water Process, Vertical Furnaces/LPCVD

Description by Manufacturer

Vertical Furnace for 300 -mm Wafers

The VF-5900 furnace is a continuation of the VF-5300 model and has been developed to welcome the new age of 300-mm silicon wafers. The VF-5900 has a batch-processing system for the mass-handling of 300-mm wafers.

Summary

The VF-5900, designed to process 300-mm wafers, can accept a stack of 12 FOUPs (Front Opening Unified Pods) and can continuously process 2 batches, each of 100 wafers. All the FOUPs loaded into the I/O port are conveyed to the buffer shelves. After that, only the FOUPs that are required are conveyed to the internal door opener. The wafers are transported in a vacuum-less environment by a highly reliable twin-arm this word means Z-theta movement robot. Ladder-type boat designed to minimize slip is a standard feature. The VF-5900 furnace uses an LGO heating element, and has a forced-cooling system to increase throughput. As an optional feature, N2 load lock can be utilized to maximize the processing capacity.

Features

High processing capacity Up to 100 wafers can be continuously processed in 2 batches.
Newly developed heating elements The furnace has heaters for low-temperature/low-temperature processes.
N2 load lock The capacity of the VF-5900's N2 load lock chamber has been redesigned to enhance throughput.
Ease of use Control is simplified by use of the Model 1400 controller which incorporates industry data requirements. (HSMS and GEM compatible.)
Maintenance The removable FOUP buffer allows easier maintenance.
Footprint Only the main unit of the VF-5900 is set up in the clean room; the supporting systems can all be installed under the floor to significantly reduce the overall footprint.

Specification

Model	VF-5900
Wafer size	300mm
Outside dimension(mm)	W1200 x D2750 x H3350
Batch size	100
Continual treatment	2 batch
Heater	LGO heater
Service temperature	300 - 1050deg.-c
Flat zone(mm)	1060
Temperature control	4zone
Cassette stock	12
Process cassette	8
Dummy cassette	2
Monitor cassette	2
Wafer transfer	vacuumless
Finger	5+1
Controller	Model 1400
Applicable to SECS	possible
Applicable to AGV	possible
Applicable to SMIF/FOUP	possible

A Summary of Process Performance

		Pyro.Ox Thick film	Pyro.Ox Thin film	P-D-Poly	Poly-Si	HTO	Si3N4	TEOS
Reaction gas		O2.H2	O2.H2	SiH4.PH3.H2	SiH4	SiH2Cl2.N2O	SiH2Cl2.NH3	Si(C2H5O)4.O2
Growth temp.(deg.-c)		1000 - 1250	800 - 1000	550 - 600	600 - 620	870 - 890	770 - 800	- 750
Growth rate(A/min)		-	-	12 - 20	60 - 100	40 - 50	20 - 50	- 100
Number of wafer(sheet)		150	150	25	100	100	100	100/50
Thickness variation(%)	Inside wafer	2	2	3	2	3	3	4	3
	Between wafers	2	2	2	2	3	2	3	2
	Between batches	2	2	2	1	2	2	2	2

Product Image

Water Process Related Products

Clean Ovens

Company Profile

About Koyo Thermo Systems Korea Co., Ltd.

Membership Free member
Registration Date2006.09.17
Country/RegionKorea
CityPyeongtaek-si
Contact Atsushi Arakawa(Mr.)

Koyo Thermo Systems wants to contribute to the development of many fields--steel, machinery, automobiles, aircraft, electronics, new materials, and the telecommunications industry-through the application of highly controlled heat technology. Think of it.

Communications that were just a dream a little while ago--portable video telephones, conversation with people anywhere in the world, being able to access all kinds of information from your own home--are now becoming a reality. Heat technology, the main field of Koyo Thermo Systems, is essential for the production of the semiconductors and display devices that make our telecommunications-based society possible.

Since its establishment in 1958, Koyo Thermo Systems has striven to meet customer needs. We have the flexible ideas and extensive know-how to make the breakthroughs into the heat technology of tomorrow.

Selling Categories

- Electrical Equipment & Supplies >> Other Electrical Equipment
- Manufacturing & Processing Machinery >> Other Manufacturing & Processing Machinery

Keywords

FPD equipment , Semiconductor Equipment , Electronic Parts Equipment

Registration Date	2006/09/17(Year/Month/Date)
Buyer / Seller in EC21	Seller
Business Type	Manufacturer
Year established	1996
Employees total	11 - 50
Annual revenue	USD 2,000,001 - 5,000,000

Contact Information Order Credit Report

Company	Koyo Thermo Systems Korea Co., Ltd.
Address	397-4, Chupal-ri, Paengseong-eup,Pyeongtaek-siGyeonggi-do451-805 Korea
Phone	82 - 31 - 6543450
Fax	82 - 31 - 6543451
Homepage	http://www.ktsk.co.kr
Contact	Atsushi Arakawa / CEO

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