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Vacuum Loading Port (Hhvce)

Vacuum Loading Port (Hhvce)
VACUUM LOADING PORT (HHVCE)Technical AdvantagesVacuum wafer cassette elevating mechanismCompatible with 150 200mm wafer cassettesAdvanced automatic door elevating mechanismIntelligent wafer status ...

EFEM/Sorter

EFEM/Sorter
High Speed 320 WPH with OCR reading 1100 WPH without OCR reading High Reliability Robot Global Top Share (Yaskawa、hirata、Tazmo) Key Components MCBF 15,000,000 cycles Super Clean Clean Class: ISO ...
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