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AccuThermo AW 820 Rapid Thermal Annealer

AccuThermo AW 820 Rapid Thermal Annealer
systems. It was founded in 1981 and produced the first single wafer RTP system in 1982, the Heatpulse 210. In 1987, it produced the Heatpulse 610. These RTP systems run at atmospheric pressure and ...

AccuThermo AW Series Rapid Thermal Processing

AccuThermo AW Series Rapid Thermal Processing
C or 400-1250 C. 1-6 gas lines with MFCs. Small samples to 8inch Round/Square Substrate. Stand Alone. With Vacuum function. Can be configured with Dry pump or Dry pump with turbo pump for high ...
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