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AWGAGE-200 Metal Film Metrology

AWGAGE-200 Metal Film Metrology
control panel until the LED comes on. Press the START/STANDBY button. The entire measurement sequence will be performed without further operator intervention. When the sequence is complete, the wafer ...

AWGAGE-150 Metal Film Metrology

AWGAGE-150 Metal Film Metrology
control panel until the LED comes on. Press the START/STANDBY button. The entire measurement sequence will be performed without further operator intervention. When the sequence is complete, the wafer ...

AccuThermo AW 610M Rapid Thermal Annealing

AccuThermo AW 610M Rapid Thermal Annealing
control instead of traditional TRIAC control. Gas Lines: MFCs, 6 lines capability .Typically, Nitrogen (N2), oxygen (O2), argon (Ar), helium (He) , Forming Gases, NH3, N2O2 etc. are used. Chamber ...

AccuThermo AW 610M Rapid Thermal Process

AccuThermo AW 610M Rapid Thermal Process
control instead of traditional TRIAC control. Gas Lines: MFCs, 6 lines capability .Typically, Nitrogen (N2), oxygen (O2), argon (Ar), helium (He) , Forming Gases, NH3, N2O2 etc. are used. Chamber ...
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