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AWGAGE-200 Metal Film Metrology

AWGAGE-200 Metal Film Metrology
processing of wafers on the Allwin21 system. Validation of the recipe so improper points will be revealed. Storage of multiple recipes, process data and calibration files so that process and ...

AWGAGE-150 Metal Film Metrology

AWGAGE-150 Metal Film Metrology
processing of wafers on the Allwin21 system. Validation of the recipe so improper points will be revealed. Storage of multiple recipes, process data and calibration files so that process and ...

AccuThermo AW 610M Rapid Thermal Annealing

AccuThermo AW 610M Rapid Thermal Annealing
processes are 400-600C for alloy, 700-950C for titanide, compound materials annealing and 1000-1050C for implant annealing Lamp Zones: 6 Zones. Bottom and top heating with 21 (1.2KW ea) Radiation ...

AccuThermo AW 610M Rapid Thermal Process

AccuThermo AW 610M Rapid Thermal Process
processes are 400-600C for alloy, 700-950C for titanide, compound materials annealing and 1000-1050C for implant annealing Lamp Zones: 6 Zones. Bottom and top heating with 21 (1.2KW ea) Radiation ...
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