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AWGAGE-200 Metal Film Metrology: first point in the measurement sequence. For multi-point measurements--press START/STANDBY once for each point in the measurement sequence. The wafer will be advanced to the next point. When the ...

AWGAGE-150 Metal Film Metrology: first point in the measurement sequence. For multi-point measurements--press START/STANDBY once for each point in the measurement sequence. The wafer will be advanced to the next point. When the ...

AccuThermo AW 820 Rapid Thermal Annealer: first single wafer RTP system in 1982, the Heatpulse 210. In 1987, it produced the Heatpulse 610. These RTP systems run at atmospheric pressure and rely on a pre-process nitrogen or argon purge prior ...

AccuThermo AW Series Rapid Thermal Processing: first single wafer RTP system in 1982, the Heatpulse 210. In 1987, it produced the Heatpulse 610. These RTP systems run at atmospheric pressure and rely on a pre-process nitrogen or argon purge prior ...

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