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AccuThermo AW 820 Rapid Thermal Annealer

AccuThermo AW 820 Rapid Thermal Annealer
founded in 1981 and produced the first single wafer RTP system in 1982, the Heatpulse 210. In 1987, it produced the Heatpulse 610. These RTP systems run at atmospheric pressure and rely on a ...

AccuThermo AW Series Rapid Thermal Processing

AccuThermo AW Series Rapid Thermal Processing
founded in 1981 and produced the first single wafer RTP system in 1982, the Heatpulse 210. In 1987, it produced the Heatpulse 610. These RTP systems run at atmospheric pressure and rely on a ...
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