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3D Large Field Size Dynamics Focusing System

3D Large Field Size Dynamics Focusing System
Size≤800mm*800mm) ≤0.1mm(Field Size≤800mm*800mm) ≤0.1mm(Field Size≤800mm*800mm) Repeatability (urad) 2 2 5 Max.Gain Drift (ppm/k) 80 80 8 Max.Offset Drift(uRad/k) 15 15 15 Long-Term Drift Over 8h ...

3-axis Galvo Scan Head

3-axis Galvo Scan Head
Max.Gain Drift (ppm/k) 80 80 8 Max.Offset Drift(uRad/k) 15 15 15 Long-Term Drift Over 8h (mRad) ≤0.3 ≤0.3 ≤0.1 Tracking Error (ms) ≤0.70 ≤0.30/≤0.45/≤0.7 ≤0.45 Wavelength(nm) 10600 1064 355 Incident ...
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