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3D Large Field Size Dynamics Focusing System: Size≤800mm*800mm） ≤0.1mm（Field Size≤800mm*800mm） ≤0.1mm（Field Size≤800mm*800mm） Repeatability (urad) 2 2 5 Max.Gain Drift (ppm/k) 80 80 8 Max.Offset Drift(uRad/k) 15 15 15 Long-Term Drift Over 8h ...

3-axis Galvo Scan Head: Offset Drift(uRad/k) 15 15 15 Long-Term Drift Over 8h (mRad) ≤0.3 ≤0.3 ≤0.1 Tracking Error (ms) ≤0.70 ≤0.30/≤0.45/≤0.7 ≤0.45 Wavelength(nm) 10600 1064 355 Incident Spot ...

2-axis Galvo Scan Head: Offset Drift (µrad/K) ＜15 ＜15 ＜15 Gain Drift (ppm/K) ＜80 ＜80 ＜80 Long-term drift over 8 hours (mrad) ＜0.3 ＜0.4 ＜0.15 1% of full scale (ms) 0.40 0.30 0.35 10% of full scale ...

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3D Large Field Size Dynamics Focusing System