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Wafer Vacuum Transfer Platform: Wafer Vacuum Transfer Module (VTM) The Vacuum Transfer Module (VTM) is used in vacuum processes such as wafer etching, deposition (CVD, PVD, ALD), etc. Due to the stringent requirements of the ...

Vacuum Loading Port (Hhvce): VACUUM LOADING PORT (HHVCE)Technical AdvantagesVacuum wafer cassette elevating mechanismCompatible with 150 200mm wafer cassettesAdvanced automatic door elevating mechanismIntelligent wafer status ...

Vacuum Pre-aligner(Hhvpa): VACUUM PRE-ALIGNER(HHVPA)Technical AdvantagesVacuum Wafer Pre-AlignerCompatible with 150v200mm wafers(manual)Little installation space, can be installed in aisle chamberHigh alignment accuracy and ...

EFEM/Sorter: High Speed 320 WPH with OCR reading 1100 WPH without OCR reading High Reliability Robot Global Top Share (Yaskawa、hirata、Tazmo) Key Components MCBF 15,000,000 cycles Super Clean Clean Class: ISO ...

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Wafer Vacuum Transfer Platform