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SiC Wafer Boat

SiC Wafer Boat
SSiC R-SiC Bulk Density g/cm3 3 3.15 ± 0.03 2.60-2.70 Flexural Strength MPa (kpsi) 338(49) 380(55) 80-90 (20°C) 90-100(1400°C) Compressive Strength MPa (kpsi) 1120(158) 3970(560) > ...

Wafer Boat for Semiconductor Process

Wafer Boat for Semiconductor Process
SSiC R-SiC Bulk Density g/cm3 3 3.15 ± 0.03 2.60-2.70 Flexural Strength MPa (kpsi) 338(49) 380(55) 80-90 (20°C) 90-100(1400°C) Compressive Strength MPa (kpsi) 1120(158) 3970(560) > ...
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