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Semiconductor Lab Equipment Setcas KW-4L Spin Coater with Oil-less Vacuum Pump and 3 Chucks: Parameters: 1. Substrate size: 5-200mm (standard)/5-600mm (need to be customized)（Need to contact customer service about the size of the substrate sizes）2. Speed range: 10-12000RPM ...

Semiconductor Lab Equipment Setcas KW-4E Spin Coater with Oil-less Vacuum Pump and 3 Chucks: customer service about the size of the substrate sizes）3. Speed range: 10-12000RPM（Standard）/10-20000RPM（Optional）4. Acceleration range: 10-30000RPM/S，Adjustable5. Motor speed stability: ±1RPM6. Spin ...

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Semiconductor Lab Equipment Setcas KW-4L Spin Coater with Oil-less Vacuum Pump and 3 Chucks