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High-Speed Miniature Piezo Fast Steering Mirror / FSM

High-Speed Miniature Piezo Fast Steering Mirror / FSM
linearity 0.1/- 0.15/- 0.2/- 0.25/- 0.25/- 0.25/- %F.S. Repeatability 0.02/- 0.02/- 0.02/- 0.02/- 0.02/- 0.02/- %F.S. Unloaded resonant frequency 3.7 3.5 3.4 3.3 3.2 3.1 kHz±20% Closed/open-loop ...

X Axis Piezo Nanopositioning Stage with 100um Travel Range From CoreMorrow

X Axis Piezo Nanopositioning Stage with 100um Travel Range From CoreMorrow
force 30/10 30/10 50/4 25/10 25/10 30/5 N Stiffness 0.3 0.3 0.25 X0.25/Y0.3 X0.25/Z0.3 X0.25/Y0.3/Z0.2 N/μm±20% Unloaded resonant ...
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