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  5. Korea power semiconductor modulesKorea power semiconductor modules
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  • Semiconductor Scrubber

    • Place of origin:  

      Korea

    module operation Large-capacity gas treatment using 4 chambers High processing efficiency of PFC GAS MODEL DBC-BECO Gas Process Plasma Arc Total Capacity 300slm for CVD Dimension 800(W) x 800(D) x 1850(H) Power Consumption 11 Kw for CF4 DRE 90% 8 Kw for NF3 DRE 95% Torch lifetime > 12 Months Target Gases / DRE CF4 1.0 slm > 90% at 150slm inlet flow for Dry etch NF3 3.0 slm > 95% at 300slm inlet f

    [Related Keywords : semiconductor scrubber]

    • BDC Inc

    • Business Type

      Manufacturer

    • Location

      Daejeon, Korea

    • Employees Total

      11 - 50

    • Annual Revenue

      More than 100,000,000

    Contact Now Start Order
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