Place of origin:
United States
Supply Ability:
200 units per year
to 4 inch or 3~6 inch, Silicon wafers. Use 3″/4″/6″ Susceptor or wafer carriers for small samples, compound material (GaAs , InP , GaN , SiC , GaInP , Glass , etc.) wafers and wafers with metal thin film on top during RTP process.
Controller: Allwin21 unique real time precise Advanced PID Control Technology with Fuzzy Logic Learn capability and Chamber Thermal Data. 0.1millisecond Control!
[Related Keywords : Rapid Thermal Anneal, Rapid Thermal Process, Heatpulse 610, AG Associates]