Place of origin:
United States
Supply Ability:
200 units per year
samples, compound material (GaAs , InP , GaN , SiC , GaInP , Glass , etc.) wafers and wafers with metal thin film on top during RTP process.
Controller: Allwin21 unique real time precise Advanced PID Control Technology with Fuzzy Logic Learn capability and Chamber Thermal Data. 0.1millisecond Control!
Temperature: Closed-loop temperature control with bare thin 0.010” Dia K type thermocouple (15
[Related Keywords : Rapid Thermal Anneal, Rapid Thermal Process, Heatpulse 610, AG Associates]