Min. Order:
1
Place of origin:
United States
Price Condition:
EXW
Supply Ability:
200 units per year
annealing and 1000-1050C for implant annealing
Lamp Zones: 6 Zones. Bottom and top heating with 21 (1.2KW ea) Radiation heating lamps. 2400hours-power-on service time! SSR Lamp control instead of traditional TRIAC control.
Gas Lines: MFCs, 6 lines capability .Typically, Nitrogen (N2), oxygen (O2), argon (Ar), helium (He) , Forming Gases, NH3, N2O2 etc. are used.
Chamber Design: 40-years-proven He
[Related Keywords : Rapid Thermal Processor, Rapid Thermal Annealing, Rapid Thermal Processing, Thermal Furnace]