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INH/Inert: INH/Inert Convection type oven with air tight chamber. Summary Non air process, such as the temperature testing, ceramic de-binding and so forth, can be performed with various gas injections, ...

Roller Hearth Continuous Furnaces: RH The Roller Hearth Conveyor system has enabled the reliable conveyance of large sized glass substrate of 60-inch class through the furnace, saving energy, and keeping clean condition. Features ...

Clean Ovens: x 600 1040 x 690 x 900 860 x 1470 x 1010 Inside dimensionW x H x D(mm) 250 x 250 x 250 450 x 450 x 450 660 x 660 x 500 Power source(V�hases) 100�1 200�3 200�3 Weight(kg) 1400 3300 5400 Flat zone ...

Water Process: to SECS possible Applicable to AGV possible Applicable to SMIF/FOUP possible A Summary of Process Performance Pyro.Ox Thick film Pyro.Ox Thin film P-D-Poly Poly-Si HTO Si3N4 TEOS Reaction ...

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INH/Inert