Applications:
■Scanning Interferometry
■Surface structure analysis
■Disc-drive-test
■Autofocus systems
■Confocal microscopy
■Biotechnology
■Semiconductor testing
P72 is high-speed, piezo-driven microscope objective nanofocusing/scanning devices, providing a positioning and scanning range of 100 um with sub-nanometer resolution and very high motion of linearity.
Technical Data:
|
Type
|
P72.Z100S
|
P72.Z100K
|
Units
|
| Active axes |
Z
|
Z
|
|
| Sensor |
SGS
|
-
|
|
| Nominal travel range（0~+120V） |
80
|
80
|
μm±20%
|
| Max travel range（-20~+150V) |
110
|
110
|
μm±20%
|
| Resolution |
5
|
2.5
|
nm
|
| Closed-loop linearity |
0.1
|
-
|
%F.S.
|
| Repeatability |
0.05
|
-
|
%F.S.
|
| Stiffness in motion direction |
1.4
|
1.4
|
N/μm±20%
|
| Unloaded resonant frequency |
350
|
350
|
Hz±20%
|
| Resonant frequency @ 200g |
120
|
120
|
Hz±20%
|
| El.capacitance |
3.6
|
3.6
|
μF±20%
|
| Material |
Steel
|
Steel
|
|
| Weight |
150
|
150
|
g±5%
|
P72 Piezo Flexure Objective Scanner is equipped with high-accuracy SGS sensor, has very high resolution and positioning resolution, and can scan fast to position within 100um travel. Fast response, compact structure, stability, free of friction and easy installation with a variety of thread interface, which can be conveniently connected with various specifications lens.
