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  • Water Process

    robot. Ladder-type boat designed to minimize slip is a standard feature. The VF-5900 furnace uses an LGO heating element, and has a forced-cooling system to increase throughput. As an optional feature, N2 load lock can be utilized to maximize the processing capacity. Features High processing capacity Up to 100 wafers can be continuously processed in 2 batches. Newly developed heating elements

    [Related Keywords : Water Process, Vertical Furnaces/LPCVD]

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