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  • Water Process

    data requirements. (HSMS and GEM compatible.) Maintenance The removable FOUP buffer allows easier maintenance. Footprint Only the main unit of the VF-5900 is set up in the clean room; the supporting systems can all be installed under the floor to significantly reduce the overall footprint. Specification Model VF-5900 Wafer size 300mm Outside dimension(mm) W1200 x D2750 x H3350 Batch size 1

    [Related Keywords : Water Process, Vertical Furnaces/LPCVD]

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