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  • Water Process

    load lock The capacity of the VF-5900's N2 load lock chamber has been redesigned to enhance throughput. Ease of use Control is simplified by use of the Model 1400 controller which incorporates industry data requirements. (HSMS and GEM compatible.) Maintenance The removable FOUP buffer allows easier maintenance. Footprint Only the main unit of the VF-5900 is set up in the clean room; the su

    [Related Keywords : Water Process, Vertical Furnaces/LPCVD]

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